T. Salo
Papers
1
Total Citations
16
H-Index
1
About
No biography available yet.
Research Focus
Bulk micromachining1 · 16 citations
CMOS1 · 16 citations
Capacitive sensing1 · 16 citations
Computer science1 · 16 citations
Deflection (physics)1 · 16 citations
Electrical engineering1 · 16 citations
Electronic engineering1 · 16 citations
Engineering1 · 16 citations
Etching (microfabrication)1 · 16 citations
Fabrication1 · 16 citations
Layer (electronics)1 · 16 citations
Materials science1 · 16 citations
Key Achievements
1
H-Index
1
Papers
16
Total Citations
16
Avg Citations/Paper
🏆 Most Cited Paper
CMOS-based sealed membranes for medical tactile sensor arrays
16 citations · 2003
📈 Most Prolific Year: 2003 (1 Papers)
🤝 Key Collaborators: 3
🏛 Institutions: ETH Zurich
Top Papers
- 1CMOS-based sealed membranes for medical tactile sensor arrays16 citations · 2003
Key Collaborators
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