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Design of a Square MEMS Piezoelectric Accelerometer With a Wide Range of Applicability, a Low Transverse Sensitivity Ratio, and High Accuracy
Cheng-Ying Li, Yueh-Han Chen, Zhiyuan Wei, Yi-Chen Ho, Sheng‐Yuan Chu, Cheng‐Che Tsai, Cheng‐Shong Hong
Citations: 14 • 2022