Microelectromechanical systems

Wearable, Human‐Interactive, Health‐Monitoring, Wireless Devices Fabricated by Macroscale Printing Techniques

Wataru Honda, Shingo Harada, Takayuki Arie, Seiji Akita, Kuniharu Takei

Citations: 453 • 2014

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

Xiaosheng Zhang, Kyungmok Kwon, Johannes Henriksson, Jianheng Luo, Ming C. Wu

Citations: 410 • 2022

Recent Progress on Flexible Capacitive Pressure Sensors: From Design and Materials to Applications

Rishabh Mishra, Nazek El‐Atab, Aftab M. Hussain, Muhammad M. Hussain

Citations: 405 • 2021

Microrobot Design Using Fiber Reinforced Composites

Robert J. Wood, S. Avadhanula, Ranjana Sahai, E. Steltz, Ronald S. Fearing

Citations: 389 • 2008

A Survey on LiDAR Scanning Mechanisms

Thinal Raj, Fazida Hanim Hashim, Aqilah Baseri Huddin, Mohd Faisal Ibrahim, Aini Hussain

Citations: 387 • 2020

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Paul Muralt, Ronald G. Polcawich, Susan Trolier‐McKinstry

Citations: 363 • 2009

An Untethered, Electrostatic, Globally Controllable MEMS Micro-Robot

Bruce R. Donald, Christopher G. Levey, Craig D. McGray, Igor Paprotny, Daniela Rus

Citations: 338 • 2006

A bimodal soft electronic skin for tactile and touchless interaction in real time

Ge Jin, Xu Wang, Michael Drack, Oleksii M. Volkov, Mo Liang, Gilbert Santiago Cañón Bermúdez, Rico Illing, Changan Wang, Shengqiang Zhou, J. Faßbender, Martin Kaltenbrunner, Denys Makarov

Citations: 325 • 2019

Design and fabrication of artificial lateral line flow sensors

Zhifang Fan, Jack Chen, Jun Zou, David Bullen, Chang Liu, Fred Delcomyn

Citations: 283 • 2002

<title>Electroelastomers: applications of dielectric elastomer transducers for actuation, generation, and smart structures</title>

Roy Kornbluh, Ron Pelrine, Qibing Pei, Richard Heydt, Scott Stanford, Seajin Oh, Joseph Eckerle

Citations: 268 • 2002

Self-assembly from milli- to nanoscales: methods and applications

Massimo Mastrangeli, Shaghayegh Abbasi, Cagdac Varel, Chris Van Hoof, J.-P. Celis, K. F. Böhringer

Citations: 251 • 2009

Bistable Structures for Advanced Functional Systems

Yunteng Cao, Masoud Derakhshani, Yu‐Hui Fang, Guoliang Huang, Changyong Cao

Citations: 250 • 2021

Light‐Driven, Caterpillar‐Inspired Miniature Inching Robot

Hao Zeng, Owies M. Wani, Piotr Wasylczyk, Arri Priimägi

Citations: 243 • 2017

High-Performance Multiresponsive Paper Actuators

Morteza Amjadi, Metin Sitti

Citations: 225 • 2016

<scp>PZT</scp> ‐Based Piezoelectric <scp>MEMS</scp> Technology

Gabriel L. Smith, Jeffrey S. Pulskamp, Luz M. Sanchez, Daniel M. Potrepka, Robert M. Proie, Tony Ivanov, Ryan Q. Rudy, William D. Nothwang, Sarah S. Bedair, Christopher Meyer, Ronald G. Polcawich

Citations: 224 • 2012

Review on Piezoelectric Actuators Based on High-Performance Piezoelectric Materials

Haonan Jin, Xiangyu Gao, Kaile Ren, Jinfeng Liu, Liao Qiao, Mingzi Liu, Wei Chen, Yuhang He, Shuxiang Dong, Zhuo Xu, Fei Li

Citations: 220 • 2022

The Feel of MEMS Barometers: Inexpensive and Easily Customized Tactile Array Sensors

Yaroslav Tenzer, Leif P. Jentoft, Robert D. Howe

Citations: 201 • 2014

Autonomous Robotic Pick-and-Place of Microobjects

Yong Zhang, B.K. Chen, Xinyu Liu, Yu Sun

Citations: 189 • 2009

Monolithic fabrication of millimeter-scale machines

P S Sreetharan, John P. Whitney, Mike Strauss, Robert J. Wood

Citations: 183 • 2012

Giant-Amplitude, High-Work Density Microactuators with Phase Transition Activated Nanolayer Bimorphs

Kai Liu, Chun Cheng, Zhenting Cheng, Kevin Wang, R. Ramesh, Junqiao Wu

Citations: 178 • 2012