OTHER
Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks.
Liu X, Che Z, Maj Z, Lai LL, Gylfason KB, Dubois V, N Raja S, Stemme G, Niklaus F
- Year
- 2026
- Journal
- Nature communications
Keywords
lithographythin films3D structureslift-off masksscaffold-architected
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