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Linear-accelerator-based high energy implanter with milliampere capability

P. Boisseau, A.S. Denholm, H.F. Glavish, G. K. Simcox

Year
1989
Citations
2

Keywords

Linear particle acceleratorIonAccelerationRange (aeronautics)Beam (structure)Ion beamIon implantationAtomic physicsPhysicsMaterials science

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