OTHER
Linear-accelerator-based high energy implanter with milliampere capability
P. Boisseau, A.S. Denholm, H.F. Glavish, G. K. Simcox
- 发表年份
- 1989
- 引用次数
- 2
关键词
Linear particle acceleratorIonAccelerationRange (aeronautics)Beam (structure)Ion beamIon implantationAtomic physicsPhysicsMaterials science
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