OTHER
Ultra-thin silicon electrothermal actuators enabled by double-sided process
Sangyeop Lee, ChangHee Son, Seok Kim
- Year
- 2025
- Citations
- 2
Keywords
ActuatorSiliconMaterials scienceOptoelectronicsMicroelectromechanical systemsProcess (computing)NanotechnologyElectrical engineeringEngineeringComputer science
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