OTHER
Ultra-thin silicon electrothermal actuators enabled by double-sided process
Sangyeop Lee, ChangHee Son, Seok Kim
- 发表年份
- 2025
- 引用次数
- 2
关键词
ActuatorSiliconMaterials scienceOptoelectronicsMicroelectromechanical systemsProcess (computing)NanotechnologyElectrical engineeringEngineeringComputer science
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