A wearable pressure and temperature sensor array using polysilicon thin film on polyimide

Abstract

This paper reports a high sensitive flexible and wearable pressure and temperature sensor array with polysilicon thin film (PTF). PTF was developed on flexible polyimide with aluminum induced crystallization at low temperature and used as the sensing material for both pressure and temperature sensors. The developed pressure sensor has high sensitivity of 1.01 mV/ kPa and resolution of 100 Pa, and temperature sensor has high sensitivity of 2.26 mV/ °C and resolution of 0.1 °C. The pressure and temperature sensor array with high sensitivity, resolution and low cross talk can be very applicable for the electronic skin of robotic fingers, prostheses and biomedical monitoring.