Haptic interface for a nanohandling robot

Abstract

Miniaturised nanohandling microrobots are used to handle objects of less than 100 μm size with accuracy down to several nanometres. Operating a nanohandling robot in the microworld and nanoworld presents challenges not found in the macroworld. To allow a good manipulability, we propose a teleoperation system, which is based on the innovative approach of haptic‐based model‐oriented teleoperation of nanohandling robots. The newly developed haptic interface for a microrobot cell is used in the proposed teleoperation system for the teleoperation of the industrial nanohandling robot. This paper presents the scanning electron microscope based nanohandling station that uses the proposed haptic‐based model‐oriented teleoperation approach. Further, we discuss the integration of a force microsensor into the teleoperation interface. The first experiments and theoretical research show that the proposed approach can improve haptic‐based teleoperation of nanohandling robots.