Automated and Robotic On-Wafer Probing Station

Abstract

Emergent microwave and millimetre-wave technologies call for new and more accurate characterization techniques. In particular, repeatability of on-wafer calibration and measurements methods must be addressed. In this work, we are presenting the hardware and software development of a new nanorobotics on-wafer probing station designed and optimized for on-wafer probing using ground-signal-ground (GSG) probes. Automated calibration considering 1-port configuration is exemplary demonstrated.