Study on Simulation of Airflow within the Enclosure in the Semiconductor Factory Cleanroom

Abstract

The application of mini-environment and SMIF (standard mechanical interface) enclosure in the cleanroom can efficiently reduce airborne particles and isolate the personnel from the product. The purpose of this article is to analyze the airflow field and pressure distribution of SMIF enclosure and to investigate the air cleanliness inside the mini-environment. Based on the continuity, momentum and energy equations of airflow motion, the simulation code CFX will be used to study the flow field of air movement corresponding to the associated boundary conditions. The results show that proper drilling holes or slots can improve the circulation zones of SMIF enclosure. The positive pressure of SMIF enclosure is mainly affected by inlet air flux, area of outlets, and leakage area. The calculated results will provide the design rules for SMIF Robot inside the SMIF enclosure and reduce the particle accumulation during robot moving.