OTHER
Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate
Jun Mizuno, Kay Nottmeyer, C. Cabuz, Kazuyuki MINAMI, Takashi Kobayashi, Masayoshi Esashi
- Year
- 1996
- Citations
- 6
Keywords
Capacitive sensingAccelerationAngular accelerationFabricationSiliconTorsion (gastropod)Angular velocityMaterials scienceAngular displacementAccelerometer
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