OTHER
Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate
Jun Mizuno, Kay Nottmeyer, C. Cabuz, Kazuyuki MINAMI, Takashi Kobayashi, Masayoshi Esashi
- 发表年份
- 1996
- 引用次数
- 6
关键词
Capacitive sensingAccelerationAngular accelerationFabricationSiliconTorsion (gastropod)Angular velocityMaterials scienceAngular displacementAccelerometer
相关论文
OTHER
📊 26,957 引用
Statistical Learning Theory
Yuhai Wu, Vladimir Vapnik
1999
OTHER
开放获取📊 20,501 引用
Fractional Differential Equations
Igor Podlubný
2025
OTHER
📊 18,993 引用
Applied Nonlinear Control
Jean-Jacques Slotine, Weiping Li
1991
OTHER
📊 13,277 引用
Genetic Programming: On the Programming of Computers by Means of Natural Selection
John R. Koza
1992