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Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno, Kay Nottmeyer, C. Cabuz, Kazuyuki MINAMI, Takashi Kobayashi, Masayoshi Esashi

发表年份
1996
引用次数
6

关键词

Capacitive sensingAccelerationAngular accelerationFabricationSiliconTorsion (gastropod)Angular velocityMaterials scienceAngular displacementAccelerometer

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