Triaxial MEMS Gyroscopes: A Review

Abstract

As a fundamental component of inertial measurement, micro electromechanical systems (MEMS) gyroscopes are extensively utilized in industrial robotics, drones, and personal navigation systems. Triaxial MEMS gyroscopes, capable of simultaneously measuring angular rates along three axes and providing three-dimensional orientation, have garnered significant attention in recent years. This paper presents three contemporary integration methods for triaxial MEMS gyroscopes: 3D integration of three single-axis gyroscopes, the monolithic single-structure triaxial gyroscope, and the monolithic multi-structure gyroscope array. Furthermore, the methods are compared and analyzed, discussing their respective advantages and disadvantages, while the future applications and development trends of triaxial MEMS gyroscopes are explored.