OTHER
Development of a Cluster Tool and Analysis of Deposition of Silicon Oxide by TEOSO<sub>2</sub> PECVD
Nilton Itiro Morimoto, Jacobus W. Swart
- Year
- 1996
- Citations
- 8
Keywords
Materials sciencePlasma-enhanced chemical vapor depositionWaferAnalytical Chemistry (journal)OxideChemical vapor depositionSilicon oxideAnnealing (glass)EllipsometryDeposition (geology)
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