OTHER
Development of a Cluster Tool and Analysis of Deposition of Silicon Oxide by TEOSO<sub>2</sub> PECVD
Nilton Itiro Morimoto, Jacobus W. Swart
- 发表年份
- 1996
- 引用次数
- 8
关键词
Materials sciencePlasma-enhanced chemical vapor depositionWaferAnalytical Chemistry (journal)OxideChemical vapor depositionSilicon oxideAnnealing (glass)EllipsometryDeposition (geology)
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