OTHER
Spectroscopic ellipsometry: a new tool for “on line” quality control
D. Zahorski, J. L. Mariani, L. Escadafals, Jean-Paul Gilles
- Year
- 1993
- Citations
- 10
Keywords
WaferEllipsometrySilicon nitrideMaterials scienceSiliconOptoelectronicsOxideSilicon oxideMetrologyReproducibility
Related papers
OTHER
📊 26,957 cites
Statistical Learning Theory
Yuhai Wu, Vladimir Vapnik
1999
OTHER
Open access📊 20,501 cites
Fractional Differential Equations
Igor Podlubný
2025
OTHER
📊 18,993 cites
Applied Nonlinear Control
Jean-Jacques Slotine, Weiping Li
1991
OTHER
📊 13,277 cites
Genetic Programming: On the Programming of Computers by Means of Natural Selection
John R. Koza
1992