首页 /研究 /Spectroscopic ellipsometry: a new tool for “on line” quality control
OTHER

Spectroscopic ellipsometry: a new tool for “on line” quality control

D. Zahorski, J. L. Mariani, L. Escadafals, Jean-Paul Gilles

发表年份
1993
引用次数
10

关键词

WaferEllipsometrySilicon nitrideMaterials scienceSiliconOptoelectronicsOxideSilicon oxideMetrologyReproducibility

相关论文

查看 OTHER 分类全部论文