OTHER
Spectroscopic ellipsometry: a new tool for “on line” quality control
D. Zahorski, J. L. Mariani, L. Escadafals, Jean-Paul Gilles
- 发表年份
- 1993
- 引用次数
- 10
关键词
WaferEllipsometrySilicon nitrideMaterials scienceSiliconOptoelectronicsOxideSilicon oxideMetrologyReproducibility
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