OTHER
Multi-sized planar capacitive pressure sensor with ultra-high sensitivity
Sicheng Chen, Shaoshan Xin, Lei Yang, Yanjie Guo, Weiqiang Zhang, Kun Sun
- Year
- 2021
- Citations
- 71
Keywords
Materials scienceCapacitive sensingPlanarSensitivity (control systems)Pressure sensorOptoelectronicsPressure sensitiveNanotechnologyElectrical engineeringElectronic engineering
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