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A silicon force sensor for robotics and medicine

David J. Beebe, Arthur S. Hsieh, Denice D. Denton, Robert G. Radwin

Year
1995
Citations
88

Keywords

Diaphragm (acoustics)Materials scienceSiliconWheatstone bridgeSurface micromachiningFabricationComposite materialOptoelectronicsElectrical engineeringVoltage

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