OTHER
A silicon force sensor for robotics and medicine
David J. Beebe, Arthur S. Hsieh, Denice D. Denton, Robert G. Radwin
- Year
- 1995
- Citations
- 88
Keywords
Diaphragm (acoustics)Materials scienceSiliconWheatstone bridgeSurface micromachiningFabricationComposite materialOptoelectronicsElectrical engineeringVoltage
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