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A silicon force sensor for robotics and medicine

David J. Beebe, Arthur S. Hsieh, Denice D. Denton, Robert G. Radwin

发表年份
1995
引用次数
88

关键词

Diaphragm (acoustics)Materials scienceSiliconWheatstone bridgeSurface micromachiningFabricationComposite materialOptoelectronicsElectrical engineeringVoltage

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