OTHER
Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting
Paul Muralt, Ronald G. Polcawich, Susan Trolier‐McKinstry
- Year
- 2009
- Citations
- 363
Keywords
PiezoelectricityMaterials scienceEnergy harvestingMicroelectromechanical systemsMicrofabricationActuatorVoltageThin filmOptoelectronicsResonator
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