OTHER
Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting
Paul Muralt, Ronald G. Polcawich, Susan Trolier‐McKinstry
- 发表年份
- 2009
- 引用次数
- 363
关键词
PiezoelectricityMaterials scienceEnergy harvestingMicroelectromechanical systemsMicrofabricationActuatorVoltageThin filmOptoelectronicsResonator
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