Wafer fabrication
相关论文数: 20
顶级研究者
最高引用论文
Scheduling analysis of time-constrained dual-armed cluster tools
Ja-Hee Kim, Tae‐Eog Lee, Hwan-Yong Lee, D.-J. Park
引用数: 275 • 2003
A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints
Naiqi Wu, Chengbin Chu, Feng Chu, Meng Zhou
引用数: 230 • 2008
Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges
Chunrong Pan, MengChu Zhou, Yan Qiao, Naiqi Wu
引用数: 123 • 2017
A review of scheduling theory and methods for semiconductor manufacturing cluster tools
Tae‐Eog Lee
引用数: 123 • 2008
Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools
QingHua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu
引用数: 112 • 2016
Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots
Hyun-Jung Kim, Jun-Ho Lee, Chihyun Jung, Tae‐Eog Lee
引用数: 109 • 2012
Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm
Hyun-Jung Kim, Jun-Ho Lee, Tae‐Eog Lee
引用数: 100 • 2014
A review of scheduling theory and methods for semiconductor manufacturing cluster tools
Tae‐Eog Lee
引用数: 97 • 2008
Modeling and implementing a real-time scheduler for dual-armed cluster tools
Yong-Ho Shin, Tae‐Eog Lee, Ja-Hee Kim, Hwan-Yong Lee
引用数: 97 • 2001
Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation
Yan Qiao, Naiqi Wu, Fajun Yang, MengChu Zhou, QingHua Zhu
引用数: 83 • 2016
Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types
Jun-Ho Lee, Hyun-Jung Kim, Tae‐Eog Lee
引用数: 73 • 2014
Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations
Tae-Sun Yu, Hyun-Jung Kim, Tae‐Eog Lee
引用数: 61 • 2017
Scheduling Dual-Armed Cluster Tools With Chamber Cleaning Operations
Tae-Sun Yu, Tae‐Eog Lee
引用数: 59 • 2017
Self-alignment of silicon chips on wafers: A capillary approach
Jean Berthier, Kenneth A. Brakke, François Grossi, L. Sanchez, L. Di Cioccio
引用数: 54 • 2010
Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Wafer Fabrication
Fajun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou
引用数: 45 • 2014
Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down
QingHua Zhu, Yan Qiao, Naiqi Wu
引用数: 42 • 2019
Makespan Analysis of Lot Switching Period in Cluster Tools
Jun-Ho Lee, Hyun-Jung Kim
引用数: 40 • 2016
Heuristic algorithms for scheduling an automated wet-etch station
Swarnendu Bhushan, Iftekhar A. Karimi
引用数: 39 • 2003
The simulation of cluster tools: a new semiconductor manufacturing technology
H. Todd LeBaron, Matk Pool
引用数: 38 • 1994
Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster Tools With Parallel Processing Modules
Hyun-Jung Kim, Jun-Ho Lee
引用数: 38 • 2018