Vacuum mechatronics and self-contained manufacturing for microelectronics processing

摘要

A self-contained automated robotic factory (SCARF) is described. This includes a central chamber with various transfer and monitoring ports, a vacuum-compatible robot for wafer transfer, and a particle monitoring system, all under automation. The cylindrical coordinate SCARF vacuum-compatible robot is unique, due to its fully vacuum-compatible motors, closed-loop control and configuration which makes it an ideal central component for a self-contained manufacturing system. Color vision system for in-vacuum inspection and measurement which will be an integral part of SCARF is being developed. Details of the SCARF system and robot are discussed, as well as the key technical issues facing the development of self-contained manufacturing systems.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>