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Robotic Assembly System in Semiconductor Industry

Ivan Cibej, Borut Solar, Tadej Bajd, Drago Rudel, A. Kralj, Z. Balorda, Ivan Verdenik

发表年份
1987
引用次数
3

摘要

A sensor-based robotic production system for assembly of rectifier bridges is described. Assembly tasks in semiconductor industry require a robot with good positional accuracy having the capability of high velocities and accelerations in all degrees of freedom. An important part of the semiconductor production is to measure the diode properties. The trajectory of the manipulator end-effector is determined by the results from these measurements. A vaccum gripper with an air flow sensor is also used in this particular task. The robotic language DARL was used to control the assembly process.

关键词

Robot end effectorGrippersProcess (computing)RobotEngineeringControl engineeringTrajectorySemiconductorDegrees of freedom (physics and chemistry)Semiconductor device fabrication

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