PCB Integrated Linbo3 Pyroelectric High Voltage Supply with Electrostatic Switch Regulator

摘要

This paper reports a new design for a miniature pyroelectric kilovolt power supply, which converts 15.5 volts to 1460 volts in a compact format (< l-cc). This voltage source is suitable for high voltage robotic actuators such as DEA, piezoelectric, and electrostatic actuators. All components were integrated on a printed circuit board (PCB) including a LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> crystal, a cantilever mechanical switch as a mechanical rectifying voltage regulator, and a capacitor to store the charge. Two switch designs were shown including a two-terminal OOP (Out-of-plane) used in pull-in mode, and a three-terminal OOP switch used in a pull-in free mode. A multi-physics (electrostatic switching, pyroelectric charge generation, thermal heat transfer) LTspice model was developed to simulate the time domain system operation. This model matches the measured voltage generation and storage, and provides a pathway for implementing arrays of pyroelectric crystal operating in parallel. The PCB integrated kilovolt generator system demonstrated a maximum gain of 97. The form factor of such power supplies is suitable for integration in cm-scale robots where a small voltage from a battery is to be converted into a high voltage needed by actuators. This power supply compares favorably to electronics-based converters (boost converters, switched-capacitor converters, and piezoelectric transformers) in voltage gain for a given size and weight requirement.