Numerical simulation for air flow in the mini-environment and SMIF enclosure

摘要

The application of mini-environment and standard mechanical interface (SMIF) enclosure in the clean room can efficiently reduce airborne particles and isolate the personnel from the product. The purpose of this article is to reduce the recirculation zone and to maintain the positive pressure from the analysis results of the airflow field and pressure distribution of SMIF enclosure and mini-environment. The simulation code CFX will be used to study the flow field of air movement corresponding to the associated design parameters. The results show that proper drilling holes or slots can reduce the circulation zones of SMIF enclosure. The positive pressure of SMIF enclosure is mainly affected by inlet air flux, area of outlets, and leakage area. The calculated results can provide the design rules for SMIF robot inside the SMIF enclosure and reduce the particle accumulation during robot moving.