Modified Spin Coating Method for Coating and Fabricating Ferroelectric Thin Films as Sensors and Solar Cells

摘要

Spin coating process with a modified spin coater is performed well, especially the second generation of modified spin coater, which has a maximum value of 18,000 rpm, is able for manufacturing/coating photonic crystal‐based ferroelectric thin films that require a high angular velocity (rpm). Ferroelectric thin films that use both 3000 and 6000 rpm have given good results in energy gap, electrical conductivity, etc. In addition, the modified spin coater has also produced several applications such as sensors in the device of blood sugar level noninvasively, sensors in the automatic drying system, sensors in the robotic system, and photovoltaic cells in the system of solar cells/panels which are being developed at present. These applications used ferroelectric material such as barium strontium titanate (BST), lithium niobate (LiNbO3), cuprous oxide (CuO), and lithium tantalate (LiTaO3).