OTHER
Vibration cancellation of semiconductor manufacturing robots
Zining Wang, Cong Wang, Masayoshi Tomizuka
- 发表年份
- 2015
- 引用次数
- 11
关键词
WaferVibrationSemiconductor device fabricationRobotSemiconductorTransducerTracking (education)UpgradeComputer scienceReduction (mathematics)
相关论文
OTHER
📊 26,957 引用
Statistical Learning Theory
Yuhai Wu, Vladimir Vapnik
1999
PERCEPTION
📊 22,245 引用
Artificial intelligence: a modern approach
1995
OTHER
开放获取📊 20,501 引用
Fractional Differential Equations
Igor Podlubný
2025
OTHER
📊 18,993 引用
Applied Nonlinear Control
Jean-Jacques Slotine, Weiping Li
1991