A SIX-LEGGED MEMS SILICON ROBOT USING MULTICHIP ASSEMBLY

摘要

A silicon-based six-legged robot was designed, fabricated, and tested. The robot is based on legs using electrostatic inchworm actuators with force densities of 1.8mN/mm 2 at 100V, a 62% improvement over similar designs previously demonstrated when normalized to V 2 . These motors manipulate planar silicon linkages, fabricated alongside the motors in a two-mask silicon-on-insulator (SOI) process. Three of these legs are arranged to actuate off the edge of their fabricated chip. Using pillars with matching throughholes, two of these leg chips are assembled with a central base for mechanical support and electrical routing, totaling 12 motors, 6 linkages, and 12 degrees-of-freedom on the robot. The 3D MEMS assembly process successfully routes 24 separate signals to wires for external control. The robot weighs 200mg and measures 9.6mm wide, 7mm tall, and 13mm long. The robot has walked forward under tethered operation.