THIN-FILM PIEZOELECTRIC ACTUATORS FOR BIO-INSPIRED MICRO-ROBOTIC APPLICATIONS

摘要

ABSTRACT Biologically-inspired autonomous micro-robots have a variety of anticipated applications resulting from their unique scale and cooperative potential. To achieve locomotion comparable to biological systems, these micro-robots will require actuators substantially stronger than most existing MEMS actuation technologies. Piezoelectric thin-films can meet these specifications while drawing limited power and contributing little mass to micro-robotic systems. Theoretical actuation requirements for micro-robotic applications show that lead-zirconium-titanate (PZT) thin-film actuators can meet these requirements, including a new thin-film PZT lateral actuator developed by the United States Army Research Laboratory. Experimental results and a comparison to other common lateral actuation technologies are presented.