Silicon oxide

Top Researchers

Gareth J. Monkman

Institution: —

Dirk Sindersberger

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Valter Böhm

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Nina Prem

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D. Zahorski

Institution: —

J. L. Mariani

Institution: —

L. Escadafals

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Jean-Paul Gilles

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Nilton Itiro Morimoto

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Jacobus W. Swart

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Spectroscopic ellipsometry: a new tool for “on line” quality control

D. Zahorski, J. L. Mariani, L. Escadafals, Jean-Paul Gilles

Citations: 10 • 1993

Development of a Cluster Tool and Analysis of Deposition of Silicon Oxide by TEOSO<sub>2</sub> PECVD

Nilton Itiro Morimoto, Jacobus W. Swart

Citations: 8 • 1996

Shape Memory Effects Using Magnetoactive Boron−Organo−Silicon Oxide Polymers

Nina Prem, Dirk Sindersberger, Birgit Striegl, Valter Böhm, Gareth J. Monkman

Citations: 7 • 2020