P. Mangiagalli
Papers
1
Total Citations
3
H-Index
1
About
P. Mangiagalli’s research career is anchored in the development of advanced X-ray instrumentation for semiconductor metrology, with a particular focus on total reflection X-ray fluorescence (TXRF) techniques. Their most cited work, “1-40-keV fixed-exit monochromator for a wafer mapping TXRF facility” (1998), describes a key component of an industrial facility designed for mapping trace impurities on 300 mm silicon wafers. This monochromator enabled the detection of elements from sodium to mercury at routine detection limits of 10⁸ atoms/cm²—a critical achievement for contamination control in semiconductor manufacturing. Though the paper has garnered 3 citations, its impact lies in its practical application: the facility was commissioned in 1998 and addressed the stringent purity requirements of next-generation wafer production. Mangiagalli’s contribution to fixed-exit monochromator design allowed for efficient, high-throughput analysis across a broad energy range (1–40 keV), bridging the gap between laboratory research and industrial quality assurance. Their work remains relevant to engineers and scientists developing non-destructive, high-sensitivity surface analysis tools for the semiconductor industry.
Research Focus
Key Achievements
Top Papers
- 11-40-keV fixed-exit monochromator for a wafer mapping TXRF facility3 citations · 1998