Flavio Giacomozzi
Papers
1
Total Citations
17
H-Index
1
About
Flavio Giacomozzi is a leading figure in microelectromechanical systems (MEMS) and sensor technology, with a particular focus on tactile sensing and silicon micromachining. His most cited work, "Ultra-Thin Silicon based Piezoelectric Capacitive Tactile Sensor" (2016, 17 citations), exemplifies his innovative approach to creating highly flexible, bendable sensors. In this study, Giacomozzi demonstrated a groundbreaking post-processing technique using wet anisotropic etching to thin bulk silicon from 636 μm down to just 35 μm, enabling the fabrication of ultra-thin tactile sensors in a piezoelectric capacitor configuration. This contribution addresses a critical challenge in robotics and prosthetics: the need for durable, conformable sensors that can mimic human touch. Beyond this flagship paper, his research spans the design, simulation, and integration of MEMS devices, including pressure sensors and microactuators. Giacomozzi’s work has been instrumental in advancing the miniaturization and flexibility of silicon-based sensors, with applications ranging from biomedical devices to industrial automation. His achievements highlight a career dedicated to pushing the boundaries of MEMS fabrication, making him a respected authority in the field.
Research Focus
Key Achievements
Top Papers
- 1Ultra-Thin Silicon based Piezoelectric Capacitive Tactile Sensor17 citations · 2016