AcArm: A Novel Semiconductor Wafer Handling Robot

Abstract

In the field of semiconductor manufacturing, highly automated production methods have become an inevitable trend of development thanks to their precise, stable and reliable characteristics. This paper focuses on the handling link in the semiconductor production process, designed a novel handling robot. Minimum Snap method is used to plan the end-effector trajectory of the robot, the control method of the robot is based on the position control, and the experiment environment is the co-simulation environment of Simulink and Adams. All the simulation testing of the planning and the control method has been done on the virtual prototype.