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Thin film microelectronics materials production in the vacuum of space

Alexander A. Ignatiev, Mark Sterling, Charles Horton, A. Freundlich, S. S. Pei, R. Hill

Year
1997
Citations
2

Abstract

The international Space Station era will open up a new dimension in the use of one of the unique attributes of space, vacuum, for the production of advanced semiconductor materials and devices for microelectronics applications. Ultra-vacuum is required for the fabrication in thin film form of high quality semiconductors. This can be accomplished behind a free flying platform similar to the current Wake Shield Facility which is specifically designed to support in-space production. The platform will require apparatus for thin film growth, a robotics interface to allow for the change out of raw materials and the harvesting of finished product, and a servicing plant incorporating Space Station that will support long-term utilization of the platform.

Keywords

MicroelectronicsSpace (punctuation)Production (economics)Interface (matter)FabricationEngineering physicsMechanical engineeringComputer scienceNanotechnologyProcess engineering

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