OTHER
Cleanroom robots become cleaner and more reliable
Anna Kochan
- Year
- 1998
- Citations
- 2
Abstract
Reviews the application of industrial robots in cleanroom environments. Outlines how trends in electronics design are increasing the demand for cleanroom robots. Reviews how cleanroom robots can be used in disk drive and semiconductor production. Outlines how cleanroom robots are also necessary in the pharmaceutical industry.
Keywords
CleanroomRobotEngineeringManufacturing engineeringComputer scienceNanotechnologyArtificial intelligenceMaterials science
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