OTHER
Production high-energy ion implanters with milliampere beam capabilities
P. Boisseau, A. Dart, A.S. Denholm, H.F. Glavish, Bruce Libby, G. K. Simcox
- Year
- 1989
- Citations
- 2
Keywords
Linear particle acceleratorInjectorBeam (structure)Ion implantationIonIon beamMaterials scienceAccelerationRange (aeronautics)Nuclear engineering
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