Micro Robot Arm Utilizing Rapid Deformations of Piezoelectric Elements

Abstract

A unique precise positioning mechanism is introduced. It utilizes inertial force and friction, and can make step-like motion of several nanometres up to several micrometres. Repeating step-like movements, precise positioning with a resolution of several nonometres and for an unlimited movable range is possible. Prototypes of joint mechanisms for a micro robot and a 4-degrees of freedom micro robot arm were constructed using this mechanism. These arms and joints proved to have a high positioning resolution and a practical maximum velocity. Applications of this micro robot arm are also discussed.