Home /Research /High-fidelity simulation of integrated single-wafer processing tools for evaluation of scheduling algorithms
OTHER

High-fidelity simulation of integrated single-wafer processing tools for evaluation of scheduling algorithms

Woo Seok Kim, Young Ha Jeon, Sung Jo Kwak, Doo Yong Lee, Hyun Joong Yoon

Year
2007
Citations
3

Keywords

Computer scienceScheduling (production processes)RobotOpenGLSemiconductor device fabricationEmbedded systemProcess (computing)WaferOperating systemVisualization

Related papers

Browse all OTHER papers