Development of Three-Axial Force Sensors for Microrobots.

Abstract

The development of a micro three-axial force sensor, which can be used as a force sensor for microassembly systems, micro robots, etc., and which becomes a distribution type force sensor when many sensors are arranged in a matrix, is the object of this research. First of all, the characteristics of a large scale model of the force sensor is theoretically and experimentally analyzed. Next, the characteristics of the micro force sensor made by bulk and surface micromachining techniques based on the above analytical result is discussed.