Calibration of CMO-Stereo-Microscopes in a Micro Robot System

Abstract

Micro-Robotics has become an active field of research in the last years. One major problem of this new technology is how to build a sensor system that can control the robot motion within the required accuracy. Our approach is based on microscopic vision as it has the advantage that the robot and the target objects can be observed and positioned within a larger field of view. The strong requirements for accuracy and reliability demand a thorough sensor calibration. A versatile photogrammetric approach for three dimensional calibration of a Stereo Light Microscope with a Common Main Objective (CMO) lens is proposed. We particularly address the problem of how to set up calibration standards with submicron precision and how to compensate the image distortion caused by the CMO lens. Numerical results based on simulated data are discussed.