<title>Electromagnetic driving units for complex microrobotic systems</title>

Abstract

Electromagnetic actuators play an important role in macroscopic robotic systems. In combination with motion transformers, like reducing gear units, angular gears or spindle-screw drives, electromagnetic motors in large product lines ensure the rotational or linear motion of robot driving units and grippers while electromagnets drive valves or part conveyors. In this paper micro actuators and miniaturized motion transformers are introduced which allow a similar development in microrobotics. An electromagnetic motor and a planetary gear box, both with a diameter of 1.9 mm, are already commercially available from the cooperation partner of IMM, the company Dr. Fritz Faulhaber GmbH in Schonaich, Germany. In addition, a motor with a diameter of 2.4 mm is in development. The motors successfully drive an angular gear and a belt drive. A linear stage with a motion range of 7 mm and an overall size as small as 5 X 3.5 X 24 mm<SUP>3</SUP> has been realized involving the motor, a stationary spur gear with zero backlash and a spindle-screw drive. By the use of these commercially available elements complex microrobots can be built up cost-efficiently and rapidly. Furthermore, a batch process has been developed to produce the coils of micro actuator arrays using lithographic techniques with SU-8 resin. In applying these components, the modular construction of complex microrobotic systems becomes feasible.