OTHER
Micromachining of Piezoelectric Microsensors and Microactuators for Robotics Applications
Dennis L. Polla
- Year
- 1992
- Citations
- 6
Keywords
MicroactuatorLead zirconate titanateMaterials scienceSurface micromachiningPiezoelectricityPyroelectricityFerroelectricityMicroelectromechanical systemsThin filmNanotechnology
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