OTHER
A Study on Wafer-Handling Robot with Coaxial Twin-Shaft Magnetic Fluid Seals
Ming Cong, Penglei Dai, Huili Shi
- Year
- 2009
- Citations
- 6
Keywords
BellowsWaferMechanical engineeringCoaxialRobotMaterials scienceSeal (emblem)MagnetRotational speedComputer science
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