OTHER
Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber
Noh Yu Kim, Min Sung Hong
- Year
- 2004
- Citations
- 7
Keywords
Reduction (mathematics)ScrubberVibrationWaferRobotic armRobotMaterials scienceAutomotive engineeringMechanical engineeringComputer science
Related papers
OTHER
📊 26,957 cites
Statistical Learning Theory
Yuhai Wu, Vladimir Vapnik
1999
PERCEPTION
📊 22,245 cites
Artificial intelligence: a modern approach
1995
OTHER
Open access📊 20,501 cites
Fractional Differential Equations
Igor Podlubný
2025
OTHER
📊 18,993 cites
Applied Nonlinear Control
Jean-Jacques Slotine, Weiping Li
1991