Track‐robot for Wafer Fabrication Intrabay Handling

Abstract

The principal results of a study concerning the industrial transfer in MOS memory wafer fabrication, of an intrabay material handling system based on a track‐robot are presented. A prototype system, installed in L'Aquila University Operations Laboratory, was used in order to verify the congruence of the track‐robot performance within the productive tasks to be carried out. Particular attention was given to the safety systems and the vibrational behaviour of the track‐robot, that strictly influence the aspects that can create risks for a person's safety or the wafer's integrity.