Hexapod Type MEMS Microrobot Equipped with an Artificial Neural Networks IC

Abstract

This paper proposes a hexapod type microrobot controlled by an artificial neural networks IC. The structural component of the microrobot is produced by micro electro mechanical systems (MEMS) process. The rotary actuator inside the robot is composed of the artificial muscle wire of shape memory alloy (SMA) material. The artificial neural networks IC includes cell body models, inhibitory synaptic models and current mirror circuits. By reducing the heat capacity of the actuator and the length of electrical wire to the actuator, the walking speed achieved 12 mm/min.